Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9595464 | Apparatus and method for reducing substrate sliding in process chambers | Sriskantharajah Thirunavukarasu, Kirankumar Neelasandra SAVANDAIAH, Cheng-Hsiung Tsai | 2017-03-14 |