Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850576 | Anti-arc zero field plate | Jonghoon Baek, Edwin C. Suarez, Tsutomu Tanaka, Edward P. Hammond, IV | 2017-12-26 |
| 9842841 | Semiconductor device and method of fabricating the same | Ji Hun Kim, Ilgweon Kim, Junhwa Song, Wonseok Yoo, Eun-Sun Lee | 2017-12-12 |
| 9837423 | Semiconductor devices having channels with retrograde doping profile | Ilgweon Kim, Hyon Namkung | 2017-12-05 |
| 9790589 | Gas cooled substrate support for stabilized high temperature deposition | Brian T. West, Michael S. Cox | 2017-10-17 |
| 9779920 | Sputtering target with backside cooling grooves | Brian T. West, Michael S. Cox | 2017-10-03 |
| 9748125 | Continuous substrate processing system | Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Ralf Hofmann, Pravin K. Narwankar +2 more | 2017-08-29 |
| 9731399 | Coated retaining ring | Daniel L. Martin, Simon Yavelberg | 2017-08-15 |
| 9610672 | Configurable pressure design for multizone chemical mechanical planarization polishing head | Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2017-04-04 |