Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748125 | Continuous substrate processing system | Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Pravin K. Narwankar, Jeonghoon Oh +2 more | 2017-08-29 |
| 9739913 | Extreme ultraviolet capping layer and method of manufacturing and lithography thereof | Cara Beasley, Majeed A. Foad, Rudy Beckstrom, III | 2017-08-22 |
| 9690016 | Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof | Cara Beasley, Vinayak Vishwanath Hassan, Majeed A. Foad | 2017-06-27 |
| 9612522 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley | 2017-04-04 |
| 9612521 | Amorphous layer extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Kevin Moraes | 2017-04-04 |
| 9595436 | Growing graphene on substrates | Cara Beasley, Majeed A. Foad | 2017-03-14 |
| 9581889 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley | 2017-02-28 |
| 9581890 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Vinayak Vishwanath Hassan, Cara Beasley, Majeed A. Foad | 2017-02-28 |