| 9748125 |
Continuous substrate processing system |
Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Pravin K. Narwankar, Jeonghoon Oh +2 more |
2017-08-29 |
| 9739913 |
Extreme ultraviolet capping layer and method of manufacturing and lithography thereof |
Cara Beasley, Majeed A. Foad, Rudy Beckstrom, III |
2017-08-22 |
| 9690016 |
Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof |
Cara Beasley, Vinayak Vishwanath Hassan, Majeed A. Foad |
2017-06-27 |
| 9612522 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor |
Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley |
2017-04-04 |
| 9612521 |
Amorphous layer extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor |
Kevin Moraes |
2017-04-04 |
| 9595436 |
Growing graphene on substrates |
Cara Beasley, Majeed A. Foad |
2017-03-14 |
| 9581889 |
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor |
Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley |
2017-02-28 |
| 9581890 |
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof |
Vinayak Vishwanath Hassan, Cara Beasley, Majeed A. Foad |
2017-02-28 |
