| 9829805 |
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor |
Timothy Michaelson, Timothy Weidman, Barry Chin, Paul Deaton |
2017-11-28 |
| 9739913 |
Extreme ultraviolet capping layer and method of manufacturing and lithography thereof |
Cara Beasley, Ralf Hofmann, Rudy Beckstrom, III |
2017-08-22 |
| 9690016 |
Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof |
Ralf Hofmann, Cara Beasley, Vinayak Vishwanath Hassan |
2017-06-27 |
| 9685186 |
HDD pattern implant system |
Jacob Newman, Jose Antonio Marin, Daniel J. Hoffman, Stephen Moffatt, Steven Verhaverbeke |
2017-06-20 |
| 9632411 |
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor |
Timothy Michaelson, Timothy Weidman, Barry Chin, Paul Deaton |
2017-04-25 |
| 9612522 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor |
Vinayak Vishwanath Hassan, Cara Beasley, Ralf Hofmann |
2017-04-04 |
| 9595436 |
Growing graphene on substrates |
Cara Beasley, Ralf Hofmann |
2017-03-14 |
| 9581889 |
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor |
Vinayak Vishwanath Hassan, Cara Beasley, Ralf Hofmann |
2017-02-28 |
| 9581890 |
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof |
Ralf Hofmann, Vinayak Vishwanath Hassan, Cara Beasley |
2017-02-28 |
