Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9739913 | Extreme ultraviolet capping layer and method of manufacturing and lithography thereof | Ralf Hofmann, Majeed A. Foad, Rudy Beckstrom, III | 2017-08-22 |
| 9690016 | Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof | Ralf Hofmann, Vinayak Vishwanath Hassan, Majeed A. Foad | 2017-06-27 |
| 9612522 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Ralf Hofmann | 2017-04-04 |
| 9595436 | Growing graphene on substrates | Ralf Hofmann, Majeed A. Foad | 2017-03-14 |
| 9581889 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Ralf Hofmann | 2017-02-28 |
| 9581890 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Ralf Hofmann, Vinayak Vishwanath Hassan, Majeed A. Foad | 2017-02-28 |