Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690016 | Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof | Ralf Hofmann, Cara Beasley, Majeed A. Foad | 2017-06-27 |
| 9612522 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Majeed A. Foad, Cara Beasley, Ralf Hofmann | 2017-04-04 |
| 9581889 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Majeed A. Foad, Cara Beasley, Ralf Hofmann | 2017-02-28 |
| 9581890 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Ralf Hofmann, Cara Beasley, Majeed A. Foad | 2017-02-28 |