Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852829 | Metal nitride material for thermistor, method for producing same, and film thermistor sensor | Hiroshi Tanaka, Hitoshi Inaba, Kazutaka Fujiwara, Noriaki Nagatomo | 2017-12-26 |
| 9842675 | Metal nitride material for thermistor, method for producing same, and film type thermistor sensor | Hiroshi Tanaka, Noriaki Nagatomo | 2017-12-12 |
| 9831019 | Metal nitride material for thermistor, method for producing same, and film type thermistor sensor | Hiroshi Tanaka, Noriaki Nagatomo | 2017-11-28 |
| 9754706 | Metal nitride material for thermistor, method for producing same, and film type thermistor sensor | Hiroshi Tanaka, Noriaki Nagatomo | 2017-09-05 |
| 9748125 | Continuous substrate processing system | Banqiu Wu, Nag B. Patibandla, Ralf Hofmann, Pravin K. Narwankar, Jeonghoon Oh +2 more | 2017-08-29 |
| 9625326 | Metal nitride material for thermistor, method for producing same, and film type thermistor sensor | Hiroshi Tanaka, Noriaki Nagatomo | 2017-04-18 |
| 9534961 | Metal nitride material for thermistor, method for producing same, and film type thermistor sensor | Hiroshi Tanaka, Noriaki Nagatomo | 2017-01-03 |