Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9844800 | Systems, methods and apparatus for post-chemical mechanical planarization substrate cleaning | Brian J. Brown | 2017-12-19 |
| 9751189 | Compliant polishing pad and polishing module | Chih-Hung Chen, Jay Gurusamy | 2017-09-05 |
| 9694470 | Stepped retaining ring | Shaun Van Der Veen | 2017-07-04 |
| 9610672 | Configurable pressure design for multizone chemical mechanical planarization polishing head | Jeonghoon Oh, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2017-04-04 |