Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9751189 | Compliant polishing pad and polishing module | Chih-Hung Chen, Steven M. Zuniga | 2017-09-05 | $19,227,000 |
| 9662762 | Modifying substrate thickness profiles | Hung Chih Chen | 2017-05-30 | $21,030,000 |