Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9808906 | Polishing system with front side pressure control | Shou-Sung Chang, Takashi Fujikawa, Paul D. Butterfield | 2017-11-07 |
| 9662762 | Modifying substrate thickness profiles | Jay Gurusamy | 2017-05-30 |
| 9625951 | Supporting base and computer system | Chen-Yi Liang, Chun-Chien Chen | 2017-04-18 |