Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9808906 | Polishing system with front side pressure control | Takashi Fujikawa, Hung Chih Chen, Paul D. Butterfield | 2017-11-07 |
| 9687960 | Polishing pad cleaning systems employing fluid outlets oriented to direct fluid under spray bodies and towards inlet ports, and related methods | Paul D. Butterfield, Bum Jick Kim | 2017-06-27 |