Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842759 | Support ring with masked edge | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2017-12-12 |
| 9735034 | Visual feedback for process control in RTP chambers | Kim Vellore, Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Leonid M. Tertitski +2 more | 2017-08-15 |
| 9659809 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Jeffrey Tobin, Jiping Li +1 more | 2017-05-23 |
| 9552989 | Apparatus and method for improved control of heating and cooling of substrates | Blake Koelmel, Joseph M. Ranish | 2017-01-24 |