Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786537 | Wafer edge measurement and control | — | 2017-10-10 |
| 9640412 | Apparatus and method for enhancing the cool down of radiatively heated substrates | Wolfgang Aderhold, Joseph M. Ranish | 2017-05-02 |
| 9564349 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Alexander Lerner +1 more | 2017-02-07 |
| 9552989 | Apparatus and method for improved control of heating and cooling of substrates | Norman L. Tam, Joseph M. Ranish | 2017-01-24 |