Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829788 | Photolithographic mask and fabrication method thereof | Yi Huang | 2017-11-28 |
| 9679822 | Method for monitoring epitaxial growth geometry shift | Lingbing Chen, Yiming Gu | 2017-06-13 |
| 9645096 | Method and system for optical measurements | Yi Huang | 2017-05-09 |
| 9620458 | Photolithography alignment mark structures, semiconductor structures, and fabrication method thereof | Yi Huang | 2017-04-11 |