Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829788 | Photolithographic mask and fabrication method thereof | Boxiu Cai | 2017-11-28 |
| 9645096 | Method and system for optical measurements | Boxiu Cai | 2017-05-09 |
| 9620458 | Photolithography alignment mark structures, semiconductor structures, and fabrication method thereof | Boxiu Cai | 2017-04-11 |