Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9644268 | Thermal bridge for chemical vapor deposition reactors | Gregg Higashi, Andreas Hegedus | 2017-05-09 |
| 9564349 | Rapid thermal processing chamber with micro-positioning system | Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2017-02-07 |
| 9536728 | Lamp for rapid thermal processing chamber | Joseph M. Ranish | 2017-01-03 |