Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558982 | Minimal contact edge ring for rapid thermal processing | Heng Pan, Kevin Joseph Bautista, Jeffrey Tobin | 2017-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558982 | Minimal contact edge ring for rapid thermal processing | Heng Pan, Kevin Joseph Bautista, Jeffrey Tobin | 2017-01-31 |