Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768052 | Minimal contact edge ring for rapid thermal processing | Heng Pan | 2017-09-19 |
| 9650726 | Methods and apparatus for deposition processes | Nyi O. Myo, Zhiyuan Ye, Schubert S. Chu, Yihwan Kim | 2017-05-16 |
| 9558982 | Minimal contact edge ring for rapid thermal processing | Heng Pan, Sairaju Tallavarjula, Jeffrey Tobin | 2017-01-31 |