Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9695508 | Liner assembly for chemical vapor deposition chamber | David K. Carlson, Mehmet Tugrul Samir | 2017-07-04 |
| 9650726 | Methods and apparatus for deposition processes | Kevin Joseph Bautista, Zhiyuan Ye, Schubert S. Chu, Yihwan Kim | 2017-05-16 |
| 9644267 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Ronald Stevens, Kenric Choi, James D. Felsch +4 more | 2017-05-09 |
| 9613835 | Heating lamp assembly | Richard O. Collins | 2017-04-04 |