Issued Patents 2017
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850568 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho | 2017-12-26 |
| 9812341 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2017-11-07 |
| 9797037 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2017-10-24 |
| 9725799 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2017-08-08 |
| 9708713 | Aerosol deposition coating for semiconductor chamber components | Jennifer Y. Sun, Tom K. Cho, Ying Zhang | 2017-07-18 |
| 9711334 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2017-07-18 |
| 9687953 | Chamber components with polished internal apertures | Jennifer Y. Sun, Vahid Firouzdor, David Koonce | 2017-06-27 |
| 9624593 | Anodization architecture for electro-plate adhesion | Jennifer Y. Sun | 2017-04-18 |
| 9617188 | Rare-earth oxide based coating | Jennifer Y. Sun | 2017-04-11 |
| 9604249 | Innovative top-coat approach for advanced device on-wafer particle performance | Jennifer Y. Sun, Dmitry Lubomirsky, Vahid Fioruzdor | 2017-03-28 |
| 9583369 | Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2017-02-28 |