Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818621 | Cyclic oxide spacer etch process | Aurelien Tavernier, Qingjun Zhou, YungChen Lin, Ying Zhang, Olivier Joubert | 2017-11-14 |
| 9721807 | Cyclic spacer etching process with improved profile control | Qingjun Zhou, Jungmin Ko, Sean S. Kang, Jeremiah T. Pender, Srinivas D. Nemani +1 more | 2017-08-01 |