| 9728444 |
Reactive ion etching assisted lift-off processes for fabricating thick metallization patterns with tight pitch |
Guy M. Cohen, Steve Holmes, Jyotica V. Patel |
2017-08-08 |
| 9728421 |
High aspect ratio patterning of hard mask materials by organic soft masks |
Markus Brink, Eric A. Joseph, Hiroyuki Miyazoe |
2017-08-08 |
| 9691972 |
Low temperature encapsulation for magnetic tunnel junction |
Anthony J. Annunziata, Eric A. Joseph, Gen P. Lauer, Nathan P. Marchack, Deborah A. Neumayer +1 more |
2017-06-27 |
| 9643179 |
Techniques for fabricating horizontally aligned nanochannels for microfluidics and biosensors |
Stephen M. Rossnagel, Ying Zhang |
2017-05-09 |
| 9633948 |
Low energy etch process for nitrogen-containing dielectric layer |
Markus Brink, Robert L. Bruce, Nicholas C. M. Fuller, Hiroyuki Miyazoe, Masahiro Nakamura |
2017-04-25 |
| 9627533 |
High selectivity nitride removal process based on selective polymer deposition |
Ravi K. Dasaka, Nicholas C. M. Fuller, Masahiro Nakamura, Richard S. Wise |
2017-04-18 |
| 9536731 |
Wet clean process for removing CxHyFz etch residue |
Robert L. Bruce, Eric A. Joseph, Mahmoud Khojasteh, Masahiro Nakamura, Satyavolu S. Papa Rao +3 more |
2017-01-03 |
