Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627533 | High selectivity nitride removal process based on selective polymer deposition | Sebastian U. Engelmann, Nicholas C. M. Fuller, Masahiro Nakamura, Richard S. Wise | 2017-04-18 |