| 9799552 |
Low resistance metal contacts to interconnects |
Stephen M. Gates, Gregory M. Fritz, Terry A. Spooner |
2017-10-24 |
| 9799519 |
Selective sputtering with light mass ions to sharpen sidewall of subtractively patterned conductive metal layer |
Hiroyuki Miyazoe |
2017-10-24 |
| 9786597 |
Self-aligned pitch split for unidirectional metal wiring |
Josephine B. Chang, Michael A. Guillorn, Hiroyuki Miyazoe |
2017-10-10 |
| 9786550 |
Low resistance metal contacts to interconnects |
Stephen M. Gates, Gregory M. Fritz, Terry A. Spooner |
2017-10-10 |
| 9728421 |
High aspect ratio patterning of hard mask materials by organic soft masks |
Markus Brink, Sebastian U. Engelmann, Hiroyuki Miyazoe |
2017-08-08 |
| 9711365 |
Etch rate enhancement for a silicon etch process through etch chamber pretreatment |
Goh Matsuura, Masahiro Nakamura, Edmund M. Sikorski, Bang N. To |
2017-07-18 |
| 9705077 |
Spin torque MRAM fabrication using negative tone lithography and ion beam etching |
Anthony J. Annunziata, Armand A. Galan, Steve Holmes, Gen P. Lauer, Qinghuang Lin +1 more |
2017-07-11 |
| 9691972 |
Low temperature encapsulation for magnetic tunnel junction |
Anthony J. Annunziata, Sebastian U. Engelmann, Gen P. Lauer, Nathan P. Marchack, Deborah A. Neumayer +1 more |
2017-06-27 |
| 9653395 |
Hybrid subtractive etch/metal fill process for fabricating interconnects |
Robert L. Bruce, Gregory M. Fritz, Hiroyuki Miyazoe |
2017-05-16 |
| 9646881 |
Hybrid subtractive etch/metal fill process for fabricating interconnects |
Robert L. Bruce, Gregory M. Fritz, Hiroyuki Miyazoe |
2017-05-09 |
| 9583401 |
Nano deposition and ablation for the repair and fabrication of integrated circuits |
Shawn A. Adderly, Jeffrey P. Gambino, Anthony C. Speranza |
2017-02-28 |
| 9564362 |
Interconnects based on subtractive etching of silver |
Brett C. Baker-O'Neal, Hiroyuki Miyazoe |
2017-02-07 |
| 9536731 |
Wet clean process for removing CxHyFz etch residue |
Robert L. Bruce, Sebastian U. Engelmann, Mahmoud Khojasteh, Masahiro Nakamura, Satyavolu S. Papa Rao +3 more |
2017-01-03 |
