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Nanogap structure for micro/nanofluidic systems formed by sacrificial sidewalls |
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2017-10-10 |
| 9738765 |
Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers |
Joy Cheng, Gregory S. Doerk, Alexander Friz, Michael A. Guillorn, Chi-Chun Liu +4 more |
2017-08-22 |
| 9728421 |
High aspect ratio patterning of hard mask materials by organic soft masks |
Sebastian U. Engelmann, Eric A. Joseph, Hiroyuki Miyazoe |
2017-08-08 |
| 9691615 |
Chemoepitaxy-based directed self assembly process with tone inversion for unidirectional wiring |
Joy Cheng, Gregory S. Doerk, Michael A. Guillorn, HsinYu Tsai |
2017-06-27 |
| 9646883 |
Chemoepitaxy etch trim using a self aligned hard mask for metal line to via |
Michael A. Guillorn, Chung-Hsun Lin, HsinYu Tsai |
2017-05-09 |
| 9633948 |
Low energy etch process for nitrogen-containing dielectric layer |
Robert L. Bruce, Sebastian U. Engelmann, Nicholas C. M. Fuller, Hiroyuki Miyazoe, Masahiro Nakamura |
2017-04-25 |
