Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9782773 | Nanogap structure for micro/nanofluidic systems formed by sacrificial sidewalls | Yann Astier, Michael F. Lofaro, Joshua T. Smith | 2017-10-10 |
| 9738765 | Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers | Joy Cheng, Gregory S. Doerk, Alexander Friz, Michael A. Guillorn, Chi-Chun Liu +4 more | 2017-08-22 |
| 9728421 | High aspect ratio patterning of hard mask materials by organic soft masks | Sebastian U. Engelmann, Eric A. Joseph, Hiroyuki Miyazoe | 2017-08-08 |
| 9691615 | Chemoepitaxy-based directed self assembly process with tone inversion for unidirectional wiring | Joy Cheng, Gregory S. Doerk, Michael A. Guillorn, HsinYu Tsai | 2017-06-27 |
| 9646883 | Chemoepitaxy etch trim using a self aligned hard mask for metal line to via | Michael A. Guillorn, Chung-Hsun Lin, HsinYu Tsai | 2017-05-09 |
| 9633948 | Low energy etch process for nitrogen-containing dielectric layer | Robert L. Bruce, Sebastian U. Engelmann, Nicholas C. M. Fuller, Hiroyuki Miyazoe, Masahiro Nakamura | 2017-04-25 |