| 9852260 |
Method and recording medium of reducing chemoepitaxy directed self-assembled defects |
Michael A. Guillorn, Kafai Lai, Chi-Chun Liu, Ananthan Raghunathan |
2017-12-26 |
| 9766229 |
Graphene nanomesh based charge sensor |
Ali Afzali-Ardakani, Shu-Jen Han, Amal Kasry, Ahmed Maarouf, Glenn J. Martyna +1 more |
2017-09-19 |
| 9738765 |
Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers |
Markus Brink, Joy Cheng, Gregory S. Doerk, Alexander Friz, Michael A. Guillorn +4 more |
2017-08-22 |
| 9691615 |
Chemoepitaxy-based directed self assembly process with tone inversion for unidirectional wiring |
Markus Brink, Joy Cheng, Gregory S. Doerk, Michael A. Guillorn |
2017-06-27 |
| 9659824 |
Graphoepitaxy directed self-assembly process for semiconductor fin formation |
Joy Cheng, Matthew E. Colburn, Michael A. Guillorn, Chi-Chun Liu, Melia Tjio |
2017-05-23 |
| 9646883 |
Chemoepitaxy etch trim using a self aligned hard mask for metal line to via |
Markus Brink, Michael A. Guillorn, Chung-Hsun Lin |
2017-05-09 |
| 9582631 |
Method and system for template pattern optimization for DSA patterning using graphoepitaxy |
Michael A. Guillorn, Kafai Lai, Melih Ozlem |
2017-02-28 |
| 9581899 |
2-dimensional patterning employing tone inverted graphoepitaxy |
Michael A. Guillorn, Kafai Lai, Jed W. Pitera |
2017-02-28 |
| 9576817 |
Pattern decomposition for directed self assembly patterns templated by sidewall image transfer |
Joy Cheng, Michael A. Guillorn, Chi-Chun Liu |
2017-02-21 |
| 9558310 |
Method and system for template pattern optimization for DSA patterning using graphoepitaxy |
Michael A. Guillorn, Kafai Lai, Melih Ozlem |
2017-01-31 |
