Matthew E. Colburn — 8 Patents at IBM

Issued Patents 2017

Showing 1–8 of 8 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9852946	Self aligned conductive lines	Sean D. Burns, Lawrence A. Clevenger, Sivananda K. Kanakasabapathy, Yann Mignot, Christopher J. Penny +2 more	2017-12-26	$2,704,000
9842737	Self-aligned quadruple patterning process	Sivananda K. Kanakasabapathy, Fee Li Lie, Stuart A. Sieg	2017-12-12	$7,756,000
9779944	Method and structure for cut material selection	Sean D. Burns, Lawrence A. Clevenger, Nelson Felix, Sivananda K. Kanakasabapathy, Yann Mignot +3 more	2017-10-03	$4,036,000
9773700	Aligning conductive vias with trenches	Sean D. Burns, Lawrence A. Clevenger, Sivananda K. Kanakasabapathy, Yann Mignot, Christopher J. Penny +2 more	2017-09-26	$3,108,000
9659824	Graphoepitaxy directed self-assembly process for semiconductor fin formation	Joy Cheng, Michael A. Guillorn, Chi-Chun Liu, Melia Tjio, HsinYu Tsai	2017-05-23	$2,171,000
9607886	Self aligned conductive lines with relaxed overlay	Sean D. Burns, Lawrence A. Clevenger, Sivananda K. Kanakasabapathy, Yann Mignot, Christopher J. Penny +2 more	2017-03-28	$2,520,000
9601345	Fin trimming in a double sit process	Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz	2017-03-21	$2,195,000
9563122	Method to harden photoresist for directed self-assembly processes	Joy Cheng, Chi-Chun Liu	2017-02-07	$2,910,000