Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9788405 | RF power delivery with approximated saw tooth wave pulsing | Katsumasa Kawasaki, Justin Phi, Daisuke Shimizu | 2017-10-10 |
| 9741539 | RF power delivery regulation for processing substrates | Katsumasa Kawasaki, Justin Phi | 2017-08-22 |
| 9639097 | Component temperature control by coolant flow control and heater duty cycle control | Chetan Mahadeswaraswamy, Kartik Ramaswamy, Bryan Liao, Duy D. Nguyen, Hamid Noorbakhsh +1 more | 2017-05-02 |