Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9788405 | RF power delivery with approximated saw tooth wave pulsing | Sergio Fukuda Shoji, Justin Phi, Daisuke Shimizu | 2017-10-10 |
| 9754767 | RF pulse reflection reduction for processing substrates | — | 2017-09-05 |
| 9741539 | RF power delivery regulation for processing substrates | Justin Phi, Sergio Fukuda Shoji | 2017-08-22 |
| 9614524 | Automatic impedance tuning with RF dual level pulsing | — | 2017-04-04 |