Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728430 | Electrostatic chuck with LED heating | William T. Weaver, Morgan Evans, Robert Brent Vopat, Paul E. Pergande, Julian G. Blake +2 more | 2017-08-08 |
| 9694989 | Workpiece handling system and methods of workpiece handling | Robert Brent Vopat, Charles T. Carlson, Malcolm N. Daniel, JR., Aaron P. Webb, William T. Weaver | 2017-07-04 |
| 9696097 | Multi-substrate thermal management apparatus | Kallol Bera, Kim Vellore, Andrew J. Constant, Jacob Newman, Jeffrey Blahnik +3 more | 2017-07-04 |
| 9685303 | Apparatus for heating and processing a substrate | Morgan Evans, D. Jeffrey Lischer, Ala Moradian | 2017-06-20 |
| 9669552 | System and method for quick-swap of multiple substrates | Robert Brent Vopat, William T. Weaver | 2017-06-06 |
| 9633886 | Hybrid thermal electrostatic clamp | Morgan Evans, Ala Moradian, D. Jeffrey Lischer, Gregory Thronson | 2017-04-25 |