Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, William T. Weaver, Morgan Evans, Paul E. Pergande, Julian G. Blake +2 more | 2017-08-08 |
| 9694989 | Workpiece handling system and methods of workpiece handling | Jason M. Schaller, Charles T. Carlson, Malcolm N. Daniel, JR., Aaron P. Webb, William T. Weaver | 2017-07-04 |
| 9696097 | Multi-substrate thermal management apparatus | Kallol Bera, Kim Vellore, Andrew J. Constant, Jacob Newman, Jeffrey Blahnik +3 more | 2017-07-04 |
| 9669552 | System and method for quick-swap of multiple substrates | Jason M. Schaller, William T. Weaver | 2017-06-06 |