Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850569 | Ion implantation for superconductor tape fabrication | Connie P. Wang, Paul J. Murphy, Paul Sullivan, Ludovic Godet, Frank Sinclair | 2017-12-26 |
| 9738968 | Apparatus and method for controlling implant process | George M. Gammel, Stanislav S. Todorov, Norman E. Hussey, Gregory Gibilaro | 2017-08-22 |
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, William T. Weaver, Robert Brent Vopat, Paul E. Pergande, Julian G. Blake +2 more | 2017-08-08 |
| 9685303 | Apparatus for heating and processing a substrate | Jason M. Schaller, D. Jeffrey Lischer, Ala Moradian | 2017-06-20 |
| 9633886 | Hybrid thermal electrostatic clamp | Jason M. Schaller, Ala Moradian, D. Jeffrey Lischer, Gregory Thronson | 2017-04-25 |