Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685303 | Apparatus for heating and processing a substrate | Morgan Evans, Jason M. Schaller, Ala Moradian | 2017-06-20 |
| 9633875 | Apparatus for improving temperature uniformity of a workpiece | Dawei Sun, Steven M. Anella, Dale K. Stone, Lyudmila Stone | 2017-04-25 |
| 9633886 | Hybrid thermal electrostatic clamp | Morgan Evans, Jason M. Schaller, Ala Moradian, Gregory Thronson | 2017-04-25 |