Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9692325 | High conductivity electrostatic chuck | David E. Suuronen, Lyudmila Stone, Julian G. Blake, Richard A. Cooke, Steven Donnell +1 more | 2017-06-27 |
| 9644269 | Diffusion resistant electrostatic clamp | Richard A. Cooke, I-Kuan Lin, Julian G. Blake, Lyudmila Stone | 2017-05-09 |
| 9633875 | Apparatus for improving temperature uniformity of a workpiece | Dawei Sun, D. Jeffrey Lischer, Steven M. Anella, Lyudmila Stone | 2017-04-25 |