Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721821 | Electrostatic chuck with photo-patternable soft protrusion contact surface | I-Kuan Lin, Jakub Rybczynski | 2017-08-01 |
| 9692325 | High conductivity electrostatic chuck | David E. Suuronen, Lyudmila Stone, Julian G. Blake, Dale K. Stone, Steven Donnell +1 more | 2017-06-27 |
| 9644269 | Diffusion resistant electrostatic clamp | Dale K. Stone, I-Kuan Lin, Julian G. Blake, Lyudmila Stone | 2017-05-09 |
| 9543187 | Electrostatic chuck | — | 2017-01-10 |