Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721821 | Electrostatic chuck with photo-patternable soft protrusion contact surface | I-Kuan Lin, Richard A. Cooke | 2017-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721821 | Electrostatic chuck with photo-patternable soft protrusion contact surface | I-Kuan Lin, Richard A. Cooke | 2017-08-01 |