Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721821 | Electrostatic chuck with photo-patternable soft protrusion contact surface | Richard A. Cooke, Jakub Rybczynski | 2017-08-01 |
| 9644269 | Diffusion resistant electrostatic clamp | Dale K. Stone, Richard A. Cooke, Julian G. Blake, Lyudmila Stone | 2017-05-09 |