Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824857 | Method for implantation of semiconductor wafers having high bulk resistivity | Michael W. Osborne, David E. Suuronen | 2017-11-21 |
| 9799492 | Textured silicon liners in substrate processing systems | — | 2017-10-24 |
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, William T. Weaver, Morgan Evans, Robert Brent Vopat, Paul E. Pergande +2 more | 2017-08-08 |
| 9692325 | High conductivity electrostatic chuck | David E. Suuronen, Lyudmila Stone, Dale K. Stone, Richard A. Cooke, Steven Donnell +1 more | 2017-06-27 |
| 9644269 | Diffusion resistant electrostatic clamp | Dale K. Stone, Richard A. Cooke, I-Kuan Lin, Lyudmila Stone | 2017-05-09 |
| 9613839 | Control of workpiece temperature via backside gas flow | — | 2017-04-04 |
| 9567691 | Melt purification and delivery system | Peter L. Kellerman, Frank Sinclair, Frederick M. Carlson | 2017-02-14 |