Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, William T. Weaver, Morgan Evans, Robert Brent Vopat, Paul E. Pergande +2 more | 2017-08-08 |
| 9685303 | Apparatus for heating and processing a substrate | Morgan Evans, Jason M. Schaller, D. Jeffrey Lischer | 2017-06-20 |
| 9633886 | Hybrid thermal electrostatic clamp | Morgan Evans, Jason M. Schaller, D. Jeffrey Lischer, Gregory Thronson | 2017-04-25 |