| 9840777 |
Apparatus for radical-based deposition of dielectric films |
Jianhua Zhou, Juan Carlos Rocha-Alvarez, Yihong Chen, Oscar Lopez, Ningli Liu |
2017-12-12 |
| 9741558 |
Selectively lateral growth of silicon oxide thin film |
Yihong Chen, Kelvin Chan, Shaunak Mukherjee |
2017-08-22 |
| 9640400 |
Conformal doping in 3D si structure using conformal dopant deposition |
Rui Cheng, Srinivas Gandikota, Pramit Manna |
2017-05-02 |
| 9624577 |
Deposition of metal doped amorphous carbon film |
Pramit Manna, Mukund Srinivasan, Rui Cheng |
2017-04-18 |
| 9613908 |
Ultra-thin dielectric diffusion barrier and etch stop layer for advanced interconnect applications |
Deenesh Padhi, Yihong Chen, Kelvin Chan, Alexandros T. Demos, Mukund Srinivasan |
2017-04-04 |
| 9583332 |
Low temperature cure modulus enhancement |
Pramit Manna, Kiran V. Thadani |
2017-02-28 |
| 9583333 |
Low temperature silicon nitride films using remote plasma CVD technology |
Amit Chatterjee, Nitin K. Ingle |
2017-02-28 |
