Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721784 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Mandar B. Pandit, Tersem Summan, Patrick Reilly +4 more | 2017-08-01 |
| 9659771 | Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning | Bencherki Mebarki, Li Yan Miao, Deenesh Padhi, Bok Hoen Kim, Christopher Dennis Bencher | 2017-05-23 |
| 9640400 | Conformal doping in 3D si structure using conformal dopant deposition | Rui Cheng, Abhijit Basu Mallick, Srinivas Gandikota | 2017-05-02 |
| 9624577 | Deposition of metal doped amorphous carbon film | Abhijit Basu Mallick, Mukund Srinivasan, Rui Cheng | 2017-04-18 |
| 9583332 | Low temperature cure modulus enhancement | Kiran V. Thadani, Abhijit Basu Mallick | 2017-02-28 |