Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583333 | Low temperature silicon nitride films using remote plasma CVD technology | Abhijit Basu Mallick, Nitin K. Ingle | 2017-02-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583333 | Low temperature silicon nitride films using remote plasma CVD technology | Abhijit Basu Mallick, Nitin K. Ingle | 2017-02-28 |