Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711360 | Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system | Ziqing Duan, Kwangduk Douglas Lee, Amit Kumar BANSAL, Bok Hoen Kim, Prashant Kumar Kulshreshtha | 2017-07-18 |
| 9589773 | In-situ etch rate determination for chamber clean endpoint | Sidharth Bhatia, Anjana M. Patel | 2017-03-07 |