Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824884 | Method for depositing metals free ald silicon nitride films using halide-based precursors | Jon Henri, Ramesh Chandrasekharan, Andrew John McKerrow, Seshasayee Varadarajan, Kathryn M. Kelchner | 2017-11-21 |
| 9659769 | Tensile dielectric films using UV curing | Bhadri N. Varadarajan, Sean Chang, Guangquan Lu, David Mordo, Kevin J. Ilcisin +2 more | 2017-05-23 |
| 9598770 | Contoured showerhead for improved plasma shaping and control | Karl Leeser | 2017-03-21 |
| 9589790 | Method of depositing ammonia free and chlorine free conformal silicon nitride film | Jon Henri, Dennis M. Hausmann, Shane Tang | 2017-03-07 |