Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824884 | Method for depositing metals free ald silicon nitride films using halide-based precursors | James S. Sims, Jon Henri, Andrew John McKerrow, Seshasayee Varadarajan, Kathryn M. Kelchner | 2017-11-21 |
| 9824941 | Systems and methods for detection of plasma instability by electrical measurement | Yukinori Sakiyama, Ishtak Karim, Yaswanth Rangineni, Adrien LaVoie, Edward Augustyniak +1 more | 2017-11-21 |
| 9758868 | Plasma suppression behind a showerhead through the use of increased pressure | Patrick Breiling, Edmund Minshall, Colin F. Smith, Andrew Duvall, Karl Leeser | 2017-09-12 |
| 9698042 | Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge | Chloe Baldasseroni, Ted Minshall, Frank L. Pasquale, Shankar Swaminathan | 2017-07-04 |
| 9677176 | Multi-plenum, dual-temperature showerhead | Jennifer Leigh Petraglia | 2017-06-13 |
| 9631276 | Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition | Jennifer O'Loughlin, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Chloe Baldasseroni +1 more | 2017-04-25 |