Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793096 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more | 2017-10-17 |
| 9758868 | Plasma suppression behind a showerhead through the use of increased pressure | Patrick Breiling, Ramesh Chandrasekharan, Edmund Minshall, Colin F. Smith, Karl Leeser | 2017-09-12 |