Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811077 | Polishing with pre deposition spectrum | Tomohiko Kitajima, Jeffrey Drue David, Taketo Sekine, Garlen C. Leung, Sidney P. Huey | 2017-11-07 |
| 9797042 | Single ALD cycle thickness control in multi-station substrate deposition systems | Romuald Nowak, Hu Kang, Adrien LaVoie | 2017-10-24 |
| 9793096 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Chloe Baldasseroni, Frank L. Pasquale +8 more | 2017-10-17 |
| 9793110 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2017-10-17 |
| 9745658 | Chamber undercoat preparation method for low temperature ALD films | Hu Kang, Adrien LaVoie | 2017-08-29 |
| 9624578 | Method for RF compensation in plasma assisted atomic layer deposition | Frank L. Pasquale, Adrien LaVoie, Chloe Baldasseroni, Hu Kang, Shankar Swaminathan +7 more | 2017-04-18 |
| 9617638 | Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system | Adrien LaVoie, Hu Kang, Purushottam Kumar, Shankar Swaminathan, Frank L. Pasquale +1 more | 2017-04-11 |
| 9579767 | Automatic generation of reference spectra for optical monitoring of substrates | Harry Q. Lee | 2017-02-28 |
| 9565635 | Activating a mobile terminal from mobile network side | Wei Sun, Haitao Xu, Xiaoyan Zhang, Bing Zhu | 2017-02-07 |