Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9649743 | Dynamically tracking spectrum features for endpoint detection | Jeffrey Drue David | 2017-05-16 |
| 9607910 | Limiting adjustment of polishing rates during substrate polishing | Dominic J. Benvegnu, Benjamin Cherian, Sivakumar Dhandapani | 2017-03-28 |
| 9579767 | Automatic generation of reference spectra for optical monitoring of substrates | Jun Qian | 2017-02-28 |