Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9719859 | Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beams | Kiwamu Takehisa | 2017-08-01 |
| 9638739 | Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference mask | Hiroki MIYAI | 2017-05-02 |
| 9588421 | Pellicle inspection apparatus | Kiwamu Takehisa, Atsushi TAJIMA | 2017-03-07 |