Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786057 | Inspection apparatus, coordinate detection apparatus, coordinate detection method, and wavefront aberration correction method | Masafumi Shinoda | 2017-10-10 |
| 9638739 | Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference mask | Haruhiko Kusunose | 2017-05-02 |